Left: SERTS instrument in RAL chamber. Right: aperture target for SERTS.


SERTS instrument in RAL chamber.


SERTS being unpacked in the receiving area at RAL. I have 4-up copies of all the pictures from the SERTS calibration.


Left: Alignment mirror is 200mm x 100mm x 20mm. Right: mount similar in design to the one used for the alignment mirror.


Another view. Note now the mirror mount works.


RAL receiving area. MOSES will come in the roll-up door.


Lots of room here, and a hoist.


Next, through the double doors and into a semi-clean area.


Around a corner and into the cleanroom through the doors at right. Note the available hoist.


Rest of the cleanroom. We have requested Class 1000 and full bunny suits for MOSES.


Through this little door to the test chamber.


We have 33" clearance without removing the door.


Remove this acrylic panel to enter the downflow area at the chamber entrance.


Downflow area before test chamber. Good place to install filters?


RAL test chamber. Beam pipe is at other end.


Test chamber.


EUV source.


Spotting scope, beam pipe and autocollimator.


Flange separation about 18.5".


Flange separation about 15.5".


Beam can move anywhere within this 8" diameter circle.


Flange of Dsubs for electrical feedthroughs. RAL can also provide some temperature monitoring via thermocouples if we like (would we?)


1/2" Cajon VCR feedthroughs for refrigerant.


Translation table. Flats on left, cone right rear, vee right front. Beam pipe is at the other end of the chamber. We can have these 4 legs repositioned as we like (with some notice). Table is about 23" wide by 26" long.


Chamber ID 42".


Chamber interior.


Pumping system: turbomolecular backed by oil/vane pump with cold trap.


Recommended refrigerant.


Refrigerator.


Handy scissor cart.


Note the rails, which link to those in the chamber for easy loading of the translation table (not shown).


Ethernet in the cleanroom. I think this is an internal-only network.


115V power: single plug, 50 Hz, up to 1 kW.